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We summarized The present advancement status of the high-power DUV laser both of those within the wavelength of FHG on the one-μm laser and at 193 nm. The latest development on the solid-condition/fiber laser, along with the nonlinear optical crystals, prompts don't just the common power but in addition the beam quality (coherence) with the DUV lasers to an unprecedented level.
全固态紫外激光器以其体积小、寿命长、效率高、光束质量好、调谐范围宽、谱线窄等优点，广泛应用于机械探伤、光刻、微加工和医学等领域，等，利用大功率近红外相干光源作为基于非线性调谐技术的基频源，通过多级变频产生紫外相干辐射被认为是发展紫外相干光源的重要途径。紫外相干光源的关键问题是研制紫外波段的非线性光学变频晶体。非线性光学晶体是实现频率变换的条件之一，因此对非线性光学晶体的生长、尺寸、损伤电阻、转换效率和允许的参数范围提出了越来越高的要求。
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On another facet, the ability scaling from the NIR laser is yet another component to enhance the average electricity on the 193-nm DUV laser. Due to insufficient the higher-energy amplification solution of your NIR laser (one example is at 1553 nm), nonlinear frequency processes for instance optical parameter oscillation (OPO) could possibly be placed on create a wavelength converter by shifting the wavelength from 1 μm to the specified wavelength together with getting relative greater electric power [21]. Lately, a diamond Raman laser showed its skill in attaining a substantial ability along with a higher conversion efficiency in the 1st Stokes from the one-μm laser [22,23], which implies the possibility to get used during the 193-nm DUV laser technology due to its large Raman achieve and huge frequency shift.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the best non-linear crystal which generates ultraviolet harmonics on the Nd:YAG basic laser wavelength. As a way to increase the hurt threshold, minimal CLBO surface roughness, by extremely-precision machining, is required. As the CLBO crystal has quick hydroscopic response and micro scratches in machining, ultra-specific machining with the CLBO crystal is often a hard technical problem.
The beam profile revealed in Figure 7b demonstrated an excellent beam good quality as on the list of deserves of Raman laser, which might be beneficial to produce a 193-nm DUV laser with a high quality beam.
Its UV absorption edge reaches a hundred and eighty nm. The powerful nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about twice as large as that of KDP. CLBO crystals is often developed with the stoichiometric melt with lower viscosity.
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